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The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions

dc.contributor.authorVan Barel, Greg
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T20:24:33Z
dc.date.available2021-10-16T20:24:33Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13013
dc.sourceIIOimport
dc.titleThe influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions
dc.typeMeeting abstract
dc.source.peerreviewyes
dc.source.beginpage344
dc.source.endpage345
dc.source.conferenceAbstracts Book Nanosmat: 2nd Int. Conf. on Surfaces, Coating and Nanostructured Materials
dc.source.conferencedate9/07/2007
dc.source.conferencelocationAlgarve Portugal
imec.availabilityPublished - imec


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