Publication:

Screening of high-k layers in MIS and MIM capacitors using aqueous chemical solution deposition

Date

2007

Proceedings Paper

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Files

15427.pdf 161.53 KB

Author(s)

Van Elshocht, Sven

;

;

Adelmann, Christoph

;

;

Conard, Thierry

;

Franquet, Alexis

;

Richard, Olivier

;

Van Bael, Marlies

;

;

De Gendt, Stefan

Statistics

1816 since deposited on 2021-10-16

Acq. date: 2026-05-20