Publication:

Screening of high-k layers in MIS and MIM capacitors using aqueous chemical solution deposition

Date

2007
Proceedings Paper
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Author(s)

Van Elshocht, Sven  
;
Hardy, An  
;
Adelmann, Christoph  
;
Caymax, Matty  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Richard, Olivier  
;
Van Bael, Marlies  
;
Mullens, J.
;
De Gendt, Stefan  

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