Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study

Van Elshocht, Sven; Hardy, An; Witters, Thomas; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Franquet, Alexis; Richard, Olivier; Van Bael, Marlies; Mullens, J.; Heyns, Marc

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Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study

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2007

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Electrochemical and Solid State-Letters

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1981 since deposited on 2021-10-16

Acq. date: 2026-02-24

Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study

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