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Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study

dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorHardy, An
dc.contributor.authorWitters, Thomas
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorMullens, J.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T20:37:40Z
dc.date.available2021-10-16T20:37:40Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13049
dc.sourceIIOimport
dc.titleAqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study
dc.typeJournal article
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageG15
dc.source.endpageG17
dc.source.journalElectrochemical and Solid State-Letters
dc.source.issue4
dc.source.volume10
imec.availabilityPublished - open access


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