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A novel method for characterizing resist performance

dc.contributor.authorVan Steenwinckel, David
dc.contributor.authorGronheid, Roel
dc.contributor.authorLammers, J.H.
dc.contributor.authorMyers, Alan
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorWillems, Patrick
dc.date.accessioned2021-10-16T20:56:18Z
dc.date.available2021-10-16T20:56:18Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13101
dc.sourceIIOimport
dc.titleA novel method for characterizing resist performance
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorWillems, Patrick
dc.source.peerreviewno
dc.source.beginpage65190V
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIV
dc.source.conferencedate25/02/2007
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesSPIE Proceedings; Vol. 6519


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