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Silicon nanophotonics in CMOS

dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBogaerts, Wim
dc.contributor.authorBrouckaert, Joost
dc.contributor.authorDumon, Pieter
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorSchrauwen, S.
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorVan Campenhout, J.
dc.contributor.authorBienstman, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T20:57:50Z
dc.date.available2021-10-16T20:57:50Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13105
dc.sourceIIOimport
dc.titleSilicon nanophotonics in CMOS
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage113
dc.source.endpage114
dc.source.conference3rd International Conference on Micro- and Nano-Engineering - MNE
dc.source.conferencedate23/09/2007
dc.source.conferencelocationCopenhagen Denmark
imec.availabilityPublished - open access


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