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Two- and three dimensional carrier/dopant profiling with (sub) nm resolution

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T21:03:53Z
dc.date.available2021-10-16T21:03:53Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13122
dc.sourceIIOimport
dc.titleTwo- and three dimensional carrier/dopant profiling with (sub) nm resolution
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceGADEST Conference: Gettering and Defect Engineering in Semiconductor Technology
dc.source.conferencedate14/10/2007
dc.source.conferencelocationErice Italy
imec.availabilityPublished - imec


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