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Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorConard, Thierry
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorBrijs, Bert
dc.contributor.authorBergmaier, A.
dc.contributor.authorKimura, K.
dc.contributor.authorvan den Berg, J.A.
dc.contributor.authorWerner, M.
dc.date.accessioned2021-10-16T21:04:36Z
dc.date.available2021-10-16T21:04:36Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13124
dc.sourceIIOimport
dc.titleQuantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on High-Resolution Depth Profiling
dc.source.conferencedate17/06/2007
dc.source.conferencelocationRadebeul Germany
imec.availabilityPublished - imec


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