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The fate of the (reactive) primary ion: sputtering and desorption

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorBerghmans, Bart
dc.contributor.authorHuyghebaert, Cedric
dc.date.accessioned2021-10-16T21:04:57Z
dc.date.available2021-10-16T21:04:57Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13125
dc.sourceIIOimport
dc.titleThe fate of the (reactive) primary ion: sputtering and desorption
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conferenceSIMS XVI
dc.source.conferencedate29/10/2007
dc.source.conferencelocationKanazawa Japan
imec.availabilityPublished - imec


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