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Probing doping conformality in FINFET structures using resistors

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJurczak, Gosia
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorPawlak, Bartek
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.date.accessioned2021-10-16T21:05:22Z
dc.date.available2021-10-16T21:05:22Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13126
dc.sourceIIOimport
dc.titleProbing doping conformality in FINFET structures using resistors
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.source.peerreviewno
dc.source.conferenceProceedings International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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