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Gatestacks for scalable high-performance FinFETs

dc.contributor.authorVellianitis, Georgios
dc.contributor.authorVan Dal, Mark
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorCuratola, Gilberto
dc.contributor.authorDoornbos, Gerben
dc.contributor.authorCollaert, Nadine
dc.contributor.authorJonville, C.
dc.contributor.authorTorregiani, Cristina
dc.contributor.authorLai, Li-Shyue
dc.contributor.authorPetry, Jasmine
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorDemand, Marc
dc.contributor.authorBeckx, Stephan
dc.contributor.authorMertens, Sofie
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorDelvaux, Christie
dc.contributor.authorLeys, Frederik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRooyackers, Rita
dc.contributor.authorKaiser, M.
dc.contributor.authorWeemaes, R.G.R.
dc.contributor.authorVoogt, F.
dc.contributor.authorRoberts, H.
dc.contributor.authorDonnet, D.
dc.contributor.authorBiesemans, Serge
dc.contributor.authorJurczak, Gosia
dc.contributor.authorLander, Rob
dc.date.accessioned2021-10-16T21:15:53Z
dc.date.available2021-10-16T21:15:53Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13154
dc.sourceIIOimport
dc.titleGatestacks for scalable high-performance FinFETs
dc.typeProceedings paper
dc.contributor.imecauthorVellianitis, Georgios
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.source.peerreviewno
dc.source.beginpage681
dc.source.endpage684
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate10/12/2007
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - imec


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