Show simple item record

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorKaneko, Shinya
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorTsuji, Naoto
dc.contributor.authorMatsushita, Kiyohiro
dc.contributor.authorKemeling, Nathan
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-16T21:22:18Z
dc.date.available2021-10-16T21:22:18Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13170
dc.sourceIIOimport
dc.titleCharacterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorKemeling, Nathan
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.beginpage9264
dc.source.endpage9268
dc.source.journalSurface and Coatings Technology
dc.source.issue22_23
dc.source.volume201
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record