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Materials characterization of WNxCy, WNx and WCx films for advanced barriers

dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBender, Hugo
dc.contributor.authorBrijs, Bert
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorCarbonell, Laure
dc.contributor.authorConard, Thierry
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorFranquet, Alexis
dc.contributor.authorGaraud, Sylvain
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorLi, Wei-Min
dc.contributor.authorMoussa, Alain
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorSprey, Hessel
dc.contributor.authorTravaly, Youssef
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorVereecke, Guy
dc.date.accessioned2021-10-16T21:31:44Z
dc.date.available2021-10-16T21:31:44Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13195
dc.sourceIIOimport
dc.titleMaterials characterization of WNxCy, WNx and WCx films for advanced barriers
dc.typeJournal article
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorVereecke, Guy
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage2441
dc.source.endpage2465
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
dc.identifier.urlMEE5688
imec.availabilityPublished - imec
imec.internalnotesMAM 2007


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