Publication:

Materials characterization of WNxCy, WNx and WCx films for advanced barriers

Date

2007

Journal article

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Author(s)

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Caluwaerts, Rudy

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Carbonell, Laure

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Conard, Thierry

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Drijbooms, Chris

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Franquet, Alexis

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Garaud, Sylvain

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Sinapi, Fabrice

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Travaly, Youssef

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Vanhaeren, Danielle

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Journal

Microelectronic Engineering

Statistics

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