Publication:

Materials characterization of WNxCy, WNx and WCx films for advanced barriers

Date

2007
Journal article
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dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBender, Hugo
dc.contributor.authorBrijs, Bert
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorCarbonell, Laure
dc.contributor.authorConard, Thierry
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorFranquet, Alexis
dc.contributor.authorGaraud, Sylvain
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorLi, Wei-Min
dc.contributor.authorMoussa, Alain
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorSprey, Hessel
dc.contributor.authorTravaly, Youssef
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorVereecke, Guy
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorVereecke, Guy
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-16T21:31:44Z
dc.date.available2021-10-16T21:31:44Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13195
dc.identifier.urlMEE5688
dc.source.beginpage2441
dc.source.endpage2465
dc.source.issue11
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Materials characterization of WNxCy, WNx and WCx films for advanced barriers

dc.typeJournal article
dspace.entity.typePublication
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