Publication:
Materials characterization of WNxCy, WNx and WCx films for advanced barriers
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1955 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-08
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1955 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2025-12-08
Citations