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Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate

dc.contributor.authorVolkos, S.N.
dc.contributor.authorBernardini, S.
dc.contributor.authorRigopoulos, N.
dc.contributor.authorEfthymiou, E.S.
dc.contributor.authorHawkins, I.D.
dc.contributor.authorHamilton, B.
dc.contributor.authorDobaczewski, L.
dc.contributor.authorHall, S.
dc.contributor.authorHurley, P.K
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPeaker, A.R
dc.date.accessioned2021-10-16T21:32:40Z
dc.date.available2021-10-16T21:32:40Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13197
dc.sourceIIOimport
dc.titleExtrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
dc.typeJournal article
dc.contributor.imecauthorDelabie, Annelies
dc.source.peerreviewno
dc.source.beginpage2374
dc.source.endpage2377
dc.source.journalMicroelectronic Engineering
dc.source.issue9_10
dc.source.volume84
imec.availabilityPublished - imec
imec.internalnotesINFOS


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