Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate

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Authors

Volkos, S.N.; Bernardini, S.; Rigopoulos, N.; Efthymiou, E.S.; Hawkins, I.D.; Hamilton, B.; Dobaczewski, L.; Hall, S.; Hurley, P.K; Delabie, Annelies; Peaker, A.R

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate

Publication type

Journal article

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