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Articles
Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
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Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Volkos, S.N.
;
Bernardini, S.
;
Rigopoulos, N.
;
Efthymiou, E.S.
;
Hawkins, I.D.
;
Hamilton, B.
;
Dobaczewski, L.
;
Hall, S.
;
Hurley, P.K
;
Delabie, Annelies
;
Peaker, A.R
Journal
Microelectronic Engineering
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1943
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1943
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations