Publication:
Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
Date
| dc.contributor.author | Volkos, S.N. | |
| dc.contributor.author | Bernardini, S. | |
| dc.contributor.author | Rigopoulos, N. | |
| dc.contributor.author | Efthymiou, E.S. | |
| dc.contributor.author | Hawkins, I.D. | |
| dc.contributor.author | Hamilton, B. | |
| dc.contributor.author | Dobaczewski, L. | |
| dc.contributor.author | Hall, S. | |
| dc.contributor.author | Hurley, P.K | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Peaker, A.R | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-16T21:32:40Z | |
| dc.date.available | 2021-10-16T21:32:40Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13197 | |
| dc.source.beginpage | 2374 | |
| dc.source.endpage | 2377 | |
| dc.source.issue | 9_10 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 84 | |
| dc.title | Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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