Publication:

Defect density of ultra-thin gate oxides grown by conventional oxidation processes

Date

1994

Proceedings Paper

Simple item page Full metadata Statistics

Files

124.pdf 138.59 KB

Author(s)

;

;

;

Schaekers, Marc

;

;

Statistics

2095 since deposited on 2021-09-29

Acq. date: 2026-02-25