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Micromachined polycrystalline SiGe-based thermopiles for micropower generation on human body
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Authors
Wang, Ziyang
;
Leonov, Vladimir
;
Fiorini, Paolo
;
Van Hoof, Chris
Conference
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Title
Micromachined polycrystalline SiGe-based thermopiles for micropower generation on human body
Publication type
Proceedings paper
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