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Demonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications

dc.contributor.authorYu, HongYu
dc.contributor.authorChang, Shou-Zen
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLauwers, Anne
dc.contributor.authorDelabie, Annelies
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorSinganamalla, Raghunath
dc.contributor.authorKerner, Christoph
dc.contributor.authorVrancken, Christa
dc.contributor.authorBrus, Stephan
dc.contributor.authorAbsil, Philippe
dc.contributor.authorHoffmann, Thomas
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T21:54:37Z
dc.date.available2021-10-16T21:54:37Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13251
dc.sourceIIOimport
dc.titleDemonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecEveraert, Jean-Luc::0000-0002-0660-9090
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage203
dc.source.endpage206
dc.source.conferenceProceedings of the 37th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate10/09/2007
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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