dc.contributor.author | Yu, HongYu | |
dc.contributor.author | Singanamalla, Raghunath | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Chang, Vincent | |
dc.contributor.author | Cho, Hag-Ju | |
dc.contributor.author | Mitsuhashi, Riichirou | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Lehnen, Peer | |
dc.contributor.author | Chang, Shou-Zen | |
dc.contributor.author | Yin, K.M. | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Biesemans, Serge | |
dc.date.accessioned | 2021-10-16T21:55:37Z | |
dc.date.available | 2021-10-16T21:55:37Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13253 | |
dc.source | IIOimport | |
dc.title | Demonstration of metal-gated low Vt n-MOSFETs using a Poly-Si/TaN/Dy2O3/SiON gate stack with a scaled EOT value | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.beginpage | 656 | |
dc.source.endpage | 658 | |
dc.source.journal | IEEE Electron Device Letters | |
dc.source.issue | 7 | |
dc.source.volume | 28 | |
imec.availability | Published - imec | |