Publication:

Instability and defects in gate dielectric: similarity and differences between Hf-stacks and SiO2

Date

2007

Proceedings Paper

Simple item page Full metadata Statistics

Files

14520.pdf 554.28 KB

Author(s)

;

;

;

;

Groeseneken, Guido

;

Pantisano, Luigi

;

De Gendt, Stefan

;

Statistics

1878 since deposited on 2021-10-16

3last month

Acq. date: 2026-09-14