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Hydrogen induced positive charge in Hf-based dielectrics

dc.contributor.authorZhao, C.Z.
dc.contributor.authorZhang, J.F.
dc.contributor.authorZahid, Mohammed
dc.contributor.authorEfthymiou, E.
dc.contributor.authorLu, Y.
dc.contributor.authorHall, S.
dc.contributor.authorPeaker, A.R.
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorPantisano, Luigi
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T22:00:53Z
dc.date.available2021-10-16T22:00:53Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13266
dc.sourceIIOimport
dc.titleHydrogen induced positive charge in Hf-based dielectrics
dc.typeJournal article
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2354
dc.source.endpage2357
dc.source.journalMicroelectronic Engineering
dc.source.issue9_10
dc.source.volume84
imec.availabilityPublished - open access
imec.internalnotesINFOS


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