Hydrogen induced positive charge in Hf-based dielectrics

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Authors

Zhao, C.Z.; Zhang, J.F.; Zahid, Mohammed; Efthymiou, E.; Lu, Y.; Hall, S.; Peaker, A.R.; Groeseneken, Guido; Pantisano, Luigi; Degraeve, Robin; De Gendt, Stefan; Heyns, Marc

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Hydrogen induced positive charge in Hf-based dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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