Publication:

Hydrogen induced positive charge in Hf-based dielectrics

Date

2007
Journal article
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15894.pdf 243.58 KB

Author(s)

Zhao, C.Z.
;
Zhang, J.F.
;
Zahid, Mohammed
;
Efthymiou, E.
;
Lu, Y.
;
Hall, S.
;
Peaker, A.R.
;
Groeseneken, Guido  
;
Pantisano, Luigi
;
Degraeve, Robin  
;
De Gendt, Stefan  
;
Heyns, Marc  

Journal

Microelectronic Engineering

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1985 since deposited on 2021-10-16
Acq. date: 2025-10-23

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1985 since deposited on 2021-10-16
Acq. date: 2025-10-23

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