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Articles
Hydrogen induced positive charge in Hf-based dielectrics
Publication:
Hydrogen induced positive charge in Hf-based dielectrics
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Date
2007
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, C.Z.
;
Zhang, J.F.
;
Zahid, Mohammed
;
Efthymiou, E.
;
Lu, Y.
;
Hall, S.
;
Peaker, A.R.
;
Groeseneken, Guido
;
Pantisano, Luigi
;
Degraeve, Robin
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Microelectronic Engineering
Abstract
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1990
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Acq. date: 2025-12-11
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Views
1990
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2025-12-11
Citations