Publication:

Hydrogen induced positive charge in Hf-based dielectrics

Date

2007
Journal article
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dc.contributor.authorZhao, C.Z.
dc.contributor.authorZhang, J.F.
dc.contributor.authorZahid, Mohammed
dc.contributor.authorEfthymiou, E.
dc.contributor.authorLu, Y.
dc.contributor.authorHall, S.
dc.contributor.authorPeaker, A.R.
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorPantisano, Luigi
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T22:00:53Z
dc.date.available2021-10-16T22:00:53Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13266
dc.source.beginpage2354
dc.source.endpage2357
dc.source.issue9_10
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Hydrogen induced positive charge in Hf-based dielectrics

dc.typeJournal article
dspace.entity.typePublication
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