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Fabrication and characterization of strained Si-on-insulator (sSOI)

dc.contributor.authorZhao, Q.T.
dc.contributor.authorBuca, D.
dc.contributor.authorFeste, S.
dc.contributor.authorGoryll, M.
dc.contributor.authorLoo, Roger
dc.contributor.authorReiche, M.
dc.contributor.authorMantl, S.
dc.date.accessioned2021-10-16T22:02:26Z
dc.date.available2021-10-16T22:02:26Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13270
dc.sourceIIOimport
dc.titleFabrication and characterization of strained Si-on-insulator (sSOI)
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference8th European Workshop on ULtimate Integration of Silicon - ULIS
dc.source.conferencedate14/03/2007
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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