dc.contributor.author | Aarts, Arno | |
dc.contributor.author | Pereira Neves, Hercules | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Van Hoof, Chris | |
dc.date.accessioned | 2021-10-17T06:13:10Z | |
dc.date.available | 2021-10-17T06:13:10Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13272 | |
dc.source | IIOimport | |
dc.title | Interconnect for out-of-plane MEMS assembly | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Aarts, Arno | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | no | |
dc.source.beginpage | 132 | |
dc.source.endpage | 134 | |
dc.source.conference | 11th International Interconnect Technology Conference | |
dc.source.conferencedate | 2/06/2008 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |