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Interconnect for out-of-plane MEMS assembly

dc.contributor.authorAarts, Arno
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T06:13:10Z
dc.date.available2021-10-17T06:13:10Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13272
dc.sourceIIOimport
dc.titleInterconnect for out-of-plane MEMS assembly
dc.typeProceedings paper
dc.contributor.imecauthorAarts, Arno
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage132
dc.source.endpage134
dc.source.conference11th International Interconnect Technology Conference
dc.source.conferencedate2/06/2008
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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