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Fieldeffektsensor auf nanokristalliner Diamantbasis

dc.contributor.authorAbouzar, M.H.
dc.contributor.authorPoghossian, A.
dc.contributor.authorSchöning, M.J.
dc.contributor.authorChristiaens, P.
dc.contributor.authorWilliams, O.A.
dc.contributor.authorWagner, Patrick
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-17T06:13:12Z
dc.date.available2021-10-17T06:13:12Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13276
dc.sourceIIOimport
dc.titleFieldeffektsensor auf nanokristalliner Diamantbasis
dc.typeProceedings paper
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage549
dc.source.endpage558
dc.source.conference14. Fachtagung Sensoren und Messsysteme
dc.source.conferencedate10/03/2008
dc.source.conferencelocationLudwigsburg Germany
imec.availabilityPublished - imec
imec.internalnotesVDI Berichte; Vol. 2011


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