Authors

Aguilera, Lidia; Polspoel, Wouter; Porti, Marc; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier

Conference

IEEE International Reliability Physics Symposium Proceedings - IRPS

Title

Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment

Publication type

Proceedings paper