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High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Publication:
High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Date
2008
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Andreas, Michael
;
Wostyn, Kurt
;
Wada, Masayuki
;
Janssens, Tom
;
Kenis, Karine
;
Bearda, Twan
;
Mertens, Paul
Journal
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1959
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1959
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations