dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Burtovyy, Ruslan | |
dc.contributor.author | Moinpour, Mansour | |
dc.contributor.author | Luzinov, Igor | |
dc.contributor.author | De Messemaeker, Joke | |
dc.contributor.author | Whelan, Caroline | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-17T06:13:58Z | |
dc.date.available | 2021-10-17T06:13:58Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0013-4651 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13311 | |
dc.source | IIOimport | |
dc.title | Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM | |
dc.type | Journal article | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | De Messemaeker, Joke | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | H218 | |
dc.source.endpage | H223 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 4 | |
dc.source.volume | 155 | |
dc.identifier.url | http://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JESOAN&smode=strresults&CURRENT=&ONLINE=YES&SMODE=&ver=&sti=&arttype= | |
imec.availability | Published - open access | |