Authors

Armini, Silvia; Burtovyy, Ruslan; Moinpour, Mansour; Luzinov, Igor; De Messemaeker, Joke; Whelan, Caroline; Maex, Karen

ISSN

0013-4651

Issue

4

Journal

Journal of the Electrochemical Society

Volume

155

Title

Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

Publication type

Journal article

Embargo date

9999-12-31