Publication:

Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

Date

2008
Journal article
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dc.contributor.authorArmini, Silvia
dc.contributor.authorBurtovyy, Ruslan
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorLuzinov, Igor
dc.contributor.authorDe Messemaeker, Joke
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorDe Messemaeker, Joke
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-17T06:13:58Z
dc.date.available2021-10-17T06:13:58Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13311
dc.identifier.urlhttp://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JESOAN&smode=strresults&CURRENT=&ONLINE=YES&SMODE=&ver=&sti=&arttype=
dc.source.beginpageH218
dc.source.endpageH223
dc.source.issue4
dc.source.journalJournal of the Electrochemical Society
dc.source.volume155
dc.title

Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

dc.typeJournal article
dspace.entity.typePublication
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