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Engineering of chemical and physical properties of low-k materials by different wavelength of UV light

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMarsik, Premysl
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorPrager, L.
dc.contributor.authorDe Roest, D.
dc.contributor.authorMechri, C.
dc.date.accessioned2021-10-17T06:14:43Z
dc.date.available2021-10-17T06:14:43Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13332
dc.sourceIIOimport
dc.titleEngineering of chemical and physical properties of low-k materials by different wavelength of UV light
dc.typeProceedings paper
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewno
dc.source.beginpage28
dc.source.endpage29
dc.source.conferenceADMETA: Advanced Metallization Conference
dc.source.conferencedate8/10/2008
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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