Show simple item record

Plasma-induced damage to low-k materials

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorTravaly, Youssef
dc.date.accessioned2021-10-17T06:14:46Z
dc.date.available2021-10-17T06:14:46Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13333
dc.sourceIIOimport
dc.titlePlasma-induced damage to low-k materials
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpageN2.6
dc.source.conferenceMRS Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Fancisco, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record