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Impact of LER and random dopant fluctuations on FinFET matching performance

dc.contributor.authorBaravelli, Emanuele
dc.contributor.authorJurczak, Gosia
dc.contributor.authorSpeciale, N.
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorDixit, Abhisek
dc.date.accessioned2021-10-17T06:14:57Z
dc.date.available2021-10-17T06:14:57Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13337
dc.sourceIIOimport
dc.titleImpact of LER and random dopant fluctuations on FinFET matching performance
dc.typeJournal article
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage291
dc.source.endpage298
dc.source.journalIEEE Tr. Nanotechnology
dc.source.issue3
dc.source.volume7
imec.availabilityPublished - open access


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