Impact of LER and random dopant fluctuations on FinFET matching performance

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Authors

Baravelli, Emanuele; Jurczak, Gosia; Speciale, N.; De Meyer, Kristin; Dixit, Abhisek

Issue

3

Journal

IEEE Tr. Nanotechnology

Volume

7

Title

Impact of LER and random dopant fluctuations on FinFET matching performance

Publication type

Journal article

Embargo date

9999-12-31

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