Impact of LER and random dopant fluctuations on FinFET matching performance

dc.contributor.author	Baravelli, Emanuele
dc.contributor.author	Jurczak, Gosia
dc.contributor.author	Speciale, N.
dc.contributor.author	De Meyer, Kristin
dc.contributor.author	Dixit, Abhisek
dc.contributor.imecauthor	Jurczak, Gosia
dc.contributor.imecauthor	De Meyer, Kristin
dc.date.accessioned	2021-10-17T06:14:57Z
dc.date.available	2021-10-17T06:14:57Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13337
dc.source.beginpage	291
dc.source.endpage	298
dc.source.issue	3
dc.source.journal	IEEE Tr. Nanotechnology
dc.source.volume	7
dc.title	Impact of LER and random dopant fluctuations on FinFET matching performance
dc.type	Journal article
dspace.entity.type	Publication
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