60nm half pitch contact layer printing: exploring the limits at 1.35NA lithography

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Authors
Bekaert, Joost; Hendrickx, Eric; Vandenberghe, Geert
Conference
Optical Microlithography XXI
Title
60nm half pitch contact layer printing: exploring the limits at 1.35NA lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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