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Experimental proximity matching of ArF scanners

dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Look, Lieve
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSchreel, K.
dc.contributor.authorMenger, J.
dc.contributor.authorSchiffelers, G.
dc.contributor.authorKnols, E.
dc.contributor.authorvan der Laan, H.
dc.contributor.authorWillekers, R.
dc.date.accessioned2021-10-17T06:16:30Z
dc.date.available2021-10-17T06:16:30Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13364
dc.sourceIIOimport
dc.titleExperimental proximity matching of ArF scanners
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage714027
dc.source.conferenceSPIE Lithography Asia
dc.source.conferencedate4/11/2008
dc.source.conferencelocationTaipei Taiwan
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; vol.7140


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