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Silicidation and metallization issues using rapid thermal processing

dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-29T14:44:44Z
dc.date.available2021-09-29T14:44:44Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1338
dc.sourceIIOimport
dc.titleSilicidation and metallization issues using rapid thermal processing
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage333
dc.source.endpage374
dc.source.conferenceAdvances in Rapid Thermal and Integrated Processing; NATO advanced study institute on Advances in Rapid Thermal and Integrated P
dc.source.conferencelocation
imec.availabilityPublished - imec


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