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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.contributor.authorNicolaides, Lena
dc.date.accessioned2021-10-17T06:19:52Z
dc.date.available2021-10-17T06:19:52Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13411
dc.sourceIIOimport
dc.titleImpact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage234
dc.source.endpage239
dc.source.journalMaterials Science & Engineering B
dc.source.volume154-155
imec.availabilityPublished - open access


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