Process development for passive photonic circuits on BCB- bonded InP membranes on silicon

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Authors
Bordas, F.; Van Laere, Frederik; Geluk, E.; Karouta, F.; Van Thourhout, Dries; Baets, Roel; Smit, M.
Conference
ePIXnetSpring School '08, Technology for Photonics Integration
Title
Process development for passive photonic circuits on BCB- bonded InP membranes on silicon
Publication type
Oral presentation
Embargo date
9999-12-31
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