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Effect of Fe contamination on quality of poly silicon gate structures

dc.contributor.authorMertens, Paul
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDepas, Michel
dc.contributor.authorKenis, Karine
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorSnee, Peter
dc.contributor.authorGräf, D.
dc.contributor.authorBrown, G.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T15:13:36Z
dc.date.available2021-09-29T15:13:36Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1347
dc.sourceIIOimport
dc.titleEffect of Fe contamination on quality of poly silicon gate structures
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage33
dc.source.endpage36
dc.source.conferenceProceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate23/09/1996
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access


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