Prediction of scratch generation in chemical mechanical planarization

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Authors
Chandra, A.; Karra, P.; Bastawros, A.F.; Biswas, R.; Sherman, P J.; Armini, Silvia; Lucca, D.A.
ISSN
0007-8506
Issue
1
Journal
CIRP Annals. Manufacturing Technology
Volume
47
Title
Prediction of scratch generation in chemical mechanical planarization
Publication type
Journal article
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