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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack
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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack
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Date
2008
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16948.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chang, K.S.
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
;
De Gendt, Stefan
;
Majhi, P.
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1853
since deposited on 2021-10-17
Acq. date: 2025-12-09
Citations
Metrics
Views
1853
since deposited on 2021-10-17
Acq. date: 2025-12-09
Citations